TMR单芯片微弱电流传感器的研制

王峥; 郭海平; 庞振江; 徐绥召; 王海宝

王峥,郭海平,庞振江,徐绥召,王海宝.TMR单芯片微弱电流传感器的研制[J].电测与仪表,2018,55(17):129-133.
wang zheng,guo haiping,pang zhenjiang,xu suizhao,wang haibao.Study and manufacture of TMR single chip weak current sensor[J].Electrical Measurement & Instrumentation,2018,55(17):129-133.

TMR单芯片微弱电流传感器的研制

Study and manufacture of TMR single chip weak current sensor

DOI：

中文关键词: TMR元件，高分辨率，微弱电流检测，MEMS

英文关键词:TMR element, high resolution, weak current detecting, MEMS

基金项目:

作者中文名	作者英文名	单位
王峥	wang zheng	北京智芯微电子科技有限公司
郭海平	guo haiping	江苏多维科技有限公司
庞振江	pang zhenjiang	北京智芯微电子科技有限公司
徐绥召	xu suizhao	江苏多维科技有限公司
王海宝	wang haibao	北京智芯微电子科技有限公司

摘要点击次数: 2221

中文摘要:

针对微弱电流的检测，提出了一种单芯片微弱电流传感器，其原理是：利用TMR元件作为磁场敏感元件，并将电流导体和TMR元件进行集成，以减小电流导体与磁场敏感元件的间距，提高电流测量的分辨率。结合MEMS工艺，通过优化设计TMR元件结构和电流导体结构，研制出了电流分辨率达到20μA的微弱电流传感器，为微弱电流检测提供了一种有效、廉价的解决方案。

英文摘要:

In this research, we obtained a single chip sensor for weak current measurement. The working principle of this sensor is utilizing the TMR device as magnetic field sensing unit, and integrating current conductors to reduce the distance between the current conductors and TMR device, and therefore, to improve the resolution in current measurement. We fabricated a weak current sensor with the resolution of 20 μA using MEMS process by optimizing the structure of both TMR device as well as current conductors. This current sensor offers a promising and economic solution for weak current measurement.

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