王峥,郭海平,庞振江,徐绥召,王海宝.TMR单芯片微弱电流传感器的研制[J].电测与仪表,2018,55(17):129-133. wang zheng,guo haiping,pang zhenjiang,xu suizhao,wang haibao.Study and manufacture of TMR single chip weak current sensor[J].Electrical Measurement & Instrumentation,2018,55(17):129-133.
TMR单芯片微弱电流传感器的研制
Study and manufacture of TMR single chip weak current sensor
In this research, we obtained a single chip sensor for weak current measurement. The working principle of this sensor is utilizing the TMR device as magnetic field sensing unit, and integrating current conductors to reduce the distance between the current conductors and TMR device, and therefore, to improve the resolution in current measurement. We fabricated a weak current sensor with the resolution of 20 μA using MEMS process by optimizing the structure of both TMR device as well as current conductors. This current sensor offers a promising and economic solution for weak current measurement.