电磁力配衡一体化柔性铰链传感器设计方法

刘小虎; 孙传鹏; 钱璐帅; 董阳; 赵伟; 李世松

刘小虎,孙传鹏,钱璐帅,董阳,赵伟,李世松.电磁力配衡一体化柔性铰链传感器设计方法[J].电测与仪表,2026,63(3):176-184.
Liu Xiaohu,Sun Chuanpeng,Qian Lushuai,Dong Yang,Zhao Wei,Li Shisong.Integrated flexible hinge sensor design approach for electromagnetic force compensation weight detector[J].Electrical Measurement & Instrumentation,2026,63(3):176-184.

电磁力配衡一体化柔性铰链传感器设计方法

Integrated flexible hinge sensor design approach for electromagnetic force compensation weight detector

DOI：10.19753/j.issn1001-1390.2026.03.018

中文关键词: 电磁力配衡重量检测器一体化柔性铰链传感器质量称量分辨率弹性系数拉丁超立方采样位移检测分辨率

英文关键词:electromagnetic force compensation weight detector, integrated flexible hinge sensor, mass weighing resolution, elasticity coefficient, latin hypercube sampling, displacement detection resolution

基金项目:国家重点研发计划资助项目（2022YFF0708600）

作者中文名	作者英文名	单位
刘小虎	Liu Xiaohu	清华大学电机系
孙传鹏	Sun Chuanpeng	北京云道智造科技有限公司
钱璐帅	Qian Lushuai	中国计量大学机电工程学院
董阳	Dong Yang	沈阳创原计量仪器有限公司
赵伟	Zhao Wei	清华大学电机系
李世松	Li Shisong	清华大学电机系

摘要点击次数: 422

中文摘要:

作为电磁力配衡重量检测器的核心部件,一体化柔性铰链传感器的测力灵敏性,直接决定着电磁力配衡重量检测器称量物体质量的分辨率。为实现更高分辨率的质量称量,文中聚焦电磁力配衡一体化柔性铰链传感器设计方法研究,具体结合拉丁超立方采样和有限元方法,并采用二项式拟合,建立了微小铰链薄壁厚度与一体化柔性铰链传感器弹性系数之间关联关系数学模型,支撑一体化柔性铰链传感器弹性系数的快速、准确计算,大幅提升了一体化柔性铰链传感器的设计效率;提出一种基于电磁力和电容式微位移传感器的一体化柔性铰链传感器弹性系数测量方法,实现了对弹性系数的高效、准确测量;并对所制备的一体化柔性铰链传感器的弹性系数进行了仿真计算和实测,具体结果分别为263. 4 N/ m 和328. 2 N/ m,基本处于同一量级。最后,文中探讨了在一体化柔性铰链传感器已基本达到灵敏性极限条件下,还可从电磁测量角度探索能实现更高微位移分辨率的检测技术,以进一步提升电磁力配衡重量检测器质量称量分辨率的可行性。

英文摘要:

As the core component of the electromagnetic force compensation weight detector, the force measurement sensitivity of the integrated flexible hinge sensor directly determines the resolution of the electromagnetic force compensation weight detector to weigh the mass of object. To achieve higher resolution mass weighing, this paper focuses on the design method of the integrated flexible hinge sensor of the electromagnetic force compensation weight detector, specifically combines the Latin hypercubic sampling and finite element method, and adopts the binomial fitting, establishes a mathematical model of the correlation relationship between the thickness of the thin wall of the miniature hinge and the elasticity coefficient of the integrated flexible hinge sensor, which supports the fast and accurate calculation of the elasticity coefficient of the integrated flexible hinge sensor, and greatly improves the sensitivity of the force measurement of the integrated flexible hinge sensor. The design efficiency of the integrated flexible hinge sensor is greatly improved; a measurement method of the elasticity coefficient of the integrated flexible hinge sensor based on electromagnetic force and the capacitive micro-displacement sensor is proposed, which achieves efficient and accurate measurement of the elasticity coefficient. The elasticity coefficients of the prepared integrated flexible hinge sensor are simulated and measured, with the specific results of 263. 4 N/ m and 328. 2 N/ m, which are basically in the same order of magnitude. Finally, this paper discusses the feasibility of exploring detection technologies that can achieve higher micro-displacement resolution from an electromagnetic measurement perspective to further enhance the mass weighing resolution of electromagnetic force compensation weight detectors, under the condition that the integrated flexible hinge sensor has basically reached its sensitivity limit.

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