• HOME
  • About Journal
    • Historical evolution
    • Journal Honors
  • Editorial Board
    • Members of Committee
    • Director of the Committee
    • President and Editor in chief
  • Submission Guide
    • Instructions for Authors
    • Manuscript Processing Flow
    • Model Text
    • Procedures for Submission
  • Academic Influence
  • Open Access
  • Ethics&Policies
    • Publication Ethics Statement
    • Peer Review Process
    • Academic Misconduct Identification and Treatment
    • Advertising and Marketing
    • Correction and Retraction
    • Conflict of Interest
    • Authorship & Copyright
  • Contact Us
  • Chinese
Site search        
文章摘要
TMR单芯片微弱电流传感器的研制
Study and manufacture of TMR single chip weak current sensor
Received:December 18, 2017  Revised:December 18, 2017
DOI:
中文关键词: TMR元件,高分辨率,微弱电流检测,MEMS
英文关键词: TMR element, high resolution, weak current detecting, MEMS
基金项目:
Author NameAffiliationE-mail
wang zheng Beijing Smart-Chip Microelectronics Technology Co., Ltd. wangzheng3@sgitg.sgcc.com.cn 
guo haiping* MultiDimension Technology Co., Ltd. haiping.guo@dowaytech.com 
pang zhenjiang Beijing Smart-Chip Microelectronics Technology Co., Ltd pangzhenjiang@sgitg.sgcc.com.cn 
xu suizhao MultiDimension Technology Co., Ltd. suizhao.xu@dowaytech.com 
wang haibao Beijing Smart-Chip Microelectronics Technology Co., Ltd. wanghaibao@sgitg.sgcc.com.cn 
Hits: 2220
Download times: 930
中文摘要:
      针对微弱电流的检测,提出了一种单芯片微弱电流传感器,其原理是:利用TMR元件作为磁场敏感元件,并将电流导体和TMR元件进行集成,以减小电流导体与磁场敏感元件的间距,提高电流测量的分辨率。结合MEMS工艺,通过优化设计TMR元件结构和电流导体结构,研制出了电流分辨率达到20μA的微弱电流传感器,为微弱电流检测提供了一种有效、廉价的解决方案。
英文摘要:
      In this research, we obtained a single chip sensor for weak current measurement. The working principle of this sensor is utilizing the TMR device as magnetic field sensing unit, and integrating current conductors to reduce the distance between the current conductors and TMR device, and therefore, to improve the resolution in current measurement. We fabricated a weak current sensor with the resolution of 20 μA using MEMS process by optimizing the structure of both TMR device as well as current conductors. This current sensor offers a promising and economic solution for weak current measurement.
View Full Text   View/Add Comment  Download reader
Close
  • Home
  • About Journal
    • Historical evolution
    • Journal Honors
  • Editorial Board
    • Members of Committee
    • Director of the Committee
    • President and Editor in chief
  • Submission Guide
    • Instructions for Authors
    • Manuscript Processing Flow
    • Model Text
    • Procedures for Submission
  • Academic Influence
  • Open Access
  • Ethics&Policies
    • Publication Ethics Statement
    • Peer Review Process
    • Academic Misconduct Identification and Treatment
    • Advertising and Marketing
    • Correction and Retraction
    • Conflict of Interest
    • Authorship & Copyright
  • Contact Us
  • 中文页面
Address: No.2000, Chuangxin Road, Songbei District, Harbin, China    Zip code: 150028
E-mail: dcyb@vip.163.com    Telephone: 0451-86611021
© 2012 Electrical Measurement & Instrumentation
黑ICP备11006624号-1
Support:Beijing Qinyun Technology Development Co., Ltd