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文章摘要
光栅直线位移测量技术研究进展与展望
Research progress and prospects of grating linear displacement measurement technology
Received:June 23, 2024  Revised:July 16, 2024
DOI:10.19753/j.issn1001-1390.2025.02.007
中文关键词: 光栅直线位移测量  高精度  高分辨力  大量程  研究进展  展望
英文关键词: grating linear displacement measurement, high precision, high resolution, large range, research progress, prospect
基金项目:国家自然科学基金资助项目( 52075520);吉林上自然科学基金项目(20230101111JC)
Author NameAffiliationE-mail
ZHAO Zhicai Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences zhaozhicai22@mails.ucas.ac.cn 
YU Hai* Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences yuhai@ciomp.ac.cn 
WAN Qiuhua Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences wanqiuhua@ciomp.ac.cn 
ZHAO Changhai Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences zhaochanghai@ciomp.ac.cn 
LI Yongjie Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences liyongjie22@mails.ucas.ac.cn 
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中文摘要:
      直线位移测量技术在机械精密制造领域扮演着至关重要的角色,是保证加工精度的关键。与其他直线位移测量技术相比,光栅直线位移测量技术具有测量精度高、抗干扰能力强,易于实现大量程测量等优点,已成为当下研究热点之一,为进一步开展光栅直线位移测量技术研究,文中分析了三种光栅直线位移测量系统的测量原理,归纳整理了三种光栅直线位移测量的研究进展,并总结现有研究的优点与存在的不足:基于莫尔条纹的光栅直线位移测量技术受限于衍射极限的影响,分辨力难以进一步提高,基于衍射光栅的直线位移测量技术难以实现绝对位置测量,基于图像处理算法的直线位移测量技术存在集成化程度较低、测量范围有限等缺点,展望了光栅直线位移测量技术的发展方向。为开展光栅直线位移测量技术研究提供依据。
英文摘要:
      Linear displacement measurement technology plays an essential role in the precision manufacturing sector, ensuring the accuracy of machining processes. Compared with other linear displacement measurement technologies, grating-based linear displacement measurement techniques offer high measurement precision, strong resistance to interference, and the ease of implementing large-scale measurements, making it a current research focus. To advance the study of grating linear displacement measurement technology, this paper initially analyzes the measurement principles of three types of grating linear displacement measurement systems. It reviews the research progress in these three areas and summarizes the strengths and limitations of existing studies: the grating linear displacement measurement technology based on Moire fringes is constrained by the diffraction limit, which hinders further improvements in resolution; the technology based on diffraction gratings struggles with absolute position measurement; and the technology based on image processing algorithms suffers from low integration and limited measurement range. This paper prospects the future development directions for grating linear displacement measurement technology, providing a foundation for further research in this field.
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